Synthesis of Au/Si nanostructures by STM lithography
نویسندگان
چکیده
A technique for synthesizing nanostructures by current lithography in a scanning tunneling microscope (STM lithography) layered Au/Si structures has been developed. An experimental dependence of the geometric dimensions created on time STM obtained. theoretical model growth is proposed, which explains nonlinear radius obtained with saturation region large radii. Keywords: nanostructures, lithography, rate, modeling.
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ژورنال
عنوان ژورنال: Pis?ma v Žurnal tehni?eskoj fiziki
سال: 2022
ISSN: ['1726-7471', '0320-0116']
DOI: https://doi.org/10.21883/tpl.2022.06.53790.19224